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Vacuum furnace "SShV8-S" for the vacuum siliconizing of graphite products
Vacuum furnace "SShV8-S" for the vacuum siliconizing of graphite products
Description
Vacuum furnace "SShV8-S" for the vacuum siliconizing of graphite products
Detailed information PDF
The vacuum furnace "SShV8-S" is designed for vacuum siliconizing of graphite products.
The operation of the furnace "SShV8-S" consists of heating the workpiece in a vacuum to a certain temperature, melting quartz in a graphite crucible and applying molten quartz from the crucible to the surface of the product located on a rotating table using the showering method.
The furnace "SShV8-S" consists of the following main units:
1. Upper cover
2. Lower cover
3. Heating chamber
4. Lifting and turning mechanism
5. Loading device
6. Electrical wiring
7. Power cabinet
8. Control cabinet
9. Operator panel
10. Lid control panel
11. Vacuum system
12. Water cooling system
13. Pneumatic system
14. Foundation
15. Overpass
16. Argon inlet ramp
The design of the unit is a vacuum heating chamber located on a trestle. The cylindrical heating chamber has an upper lid and a lower lid. The lifting and turning mechanism is attached to the heating chamber from the side. The upper lid is attached to the lifting mechanism. This mechanism is used to lift and turn the lid to service the heating chamber.
The loading device is located under the trestle at the bottom of the heating chamber. The lower lid is attached to the loading device. The lower lid can move up and down with the loading device, and can also move in the longitudinal direction to perform the operation of installing the carbonized graphite product on the rotary table of the lower lid. The loading device has mechanisms for moving along guide rails located in the foundation.
The lifting mechanism of the loading device can press the lower lid to the heating chamber and seal it. The lower and upper lids are in a pressed position to the heating chamber during the carbonization process.
The vacuum system is attached to the heating chamber.
The pneumatic system, water cooling system and argon inlet ramp are located under the overpass.
The power cabinet, control cabinet, operator panel and transformers for the heating chamber heaters and the lower cover are located on the side of the overpass. The elements of the electrical wiring system are located on the heating chamber itself and the overpass.
The upper elliptical cover is made of stainless steel with a water cooling jacket. The inspection window, safety valve, pipes and bracket for attaching to the mechanism for lifting and rotating the cover are located on the cover.
Thermal insulation, made of carbon-graphite composite material, is attached inside the cover on special hangers.
The lower elliptical cover is made of stainless steel with a water cooling jacket. Pipes with three water-cooled current leads are installed on the cover. The rotation mechanism and thermocouple are attached to the bottom of the cover. Thermal insulation is attached to special supports on the inside of the lower cover. It is made of carbon-graphite composite material. The graphite heater, located below the table, is attached to the current leads. The table is attached to the rotation mechanism on a special tool. During the carbonization process, the table rotates using the rotation mechanism attached to the bottom of the cover. The current leads and the shaft of the rotation mechanism have vacuum seals that ensure tightness. The lower cover is attached to the loading device through special brackets.
The cylindrical heating chamber is made of stainless steel and has a water cooling jacket. The heating chamber is located vertically on the overpass and is attached to brackets at four points located on the top of the overpass. The chamber has three cooled current leads and a thermocouple for measuring temperature. Thermal insulation made of carbon composite graphite materials is attached inside the chamber, which in turn is attached to a steel screen. The screen on brackets is attached together with the thermal insulation to the body of the heating chamber. The chamber has the necessary brackets made of carbon graphite materials, on which the graphite heater is attached. The heating chamber has a branch pipe for connecting to the vacuum system.
The lifting and turning mechanism has a screw pair and a bracket to which the top cover is attached. The bracket is inserted into the guide pipe with a rotary groove. The gearbox with an electric motor is attached from below to the guide pipe. The entire lifting and turning mechanism is attached vertically to the heating chamber body.
The loading device is a platform with four wheels, two of which are driving wheels, connected by a common axle to the travel reducer via a chain transmission. Two jacks, made in the form of rectangular posts, are located on the platform. A screw pair, connected via bevel gears to the lifting mechanism axle, is located inside the posts. The posts have grooves and guides along which the supports move. The supports are attached to the lower cover. The loading device moves along a rail track located on the foundation.
The electrical wiring is designed to provide power supply to the heaters from transformers and to provide power to the control circuits of the mechanisms of the units with electric drives. The electrical wiring has a busbar, harnesses and protective covers and boxes in which the wires are laid.
The power cabinet, control cabinet, operator's console and cover control panel are designed to ensure uninterrupted operation and control of the technological process performed at the installation.
The vacuum system is designed to create a vacuum in the chamber volume and to let inert gas into it when cooling the product. The system consists of a forevacuum pumping line and a booster pumping line.
A pumping ramp is designed to let inert argon gas into the chamber.
The pneumatic system is designed to control the pneumatic drives of the vacuum valves. The pneumatic system consists of an air preparation unit, a panel of pneumatic distributors and pipelines.
The water cooling system is designed to supply and drain water required to cool the vacuum pump systems during the process mode. The water cooling system is divided into two circuits and consists of pressure and drain manifolds. One circuit cools the vacuum system, and the other cools the lid bottom jackets, chamber current leads, thyristors and the chamber itself.
The operation of the furnace "SShV8-S" consists of heating the workpiece in a vacuum to a certain temperature, melting quartz in a graphite crucible and applying molten quartz from the crucible to the surface of the product located on a rotating table using the showering method.
The furnace "SShV8-S" consists of the following main units:
1. Upper cover
2. Lower cover
3. Heating chamber
4. Lifting and turning mechanism
5. Loading device
6. Electrical wiring
7. Power cabinet
8. Control cabinet
9. Operator panel
10. Lid control panel
11. Vacuum system
12. Water cooling system
13. Pneumatic system
14. Foundation
15. Overpass
16. Argon inlet ramp
The design of the unit is a vacuum heating chamber located on a trestle. The cylindrical heating chamber has an upper lid and a lower lid. The lifting and turning mechanism is attached to the heating chamber from the side. The upper lid is attached to the lifting mechanism. This mechanism is used to lift and turn the lid to service the heating chamber.
The loading device is located under the trestle at the bottom of the heating chamber. The lower lid is attached to the loading device. The lower lid can move up and down with the loading device, and can also move in the longitudinal direction to perform the operation of installing the carbonized graphite product on the rotary table of the lower lid. The loading device has mechanisms for moving along guide rails located in the foundation.
The lifting mechanism of the loading device can press the lower lid to the heating chamber and seal it. The lower and upper lids are in a pressed position to the heating chamber during the carbonization process.
The vacuum system is attached to the heating chamber.
The pneumatic system, water cooling system and argon inlet ramp are located under the overpass.
The power cabinet, control cabinet, operator panel and transformers for the heating chamber heaters and the lower cover are located on the side of the overpass. The elements of the electrical wiring system are located on the heating chamber itself and the overpass.
The upper elliptical cover is made of stainless steel with a water cooling jacket. The inspection window, safety valve, pipes and bracket for attaching to the mechanism for lifting and rotating the cover are located on the cover.
Thermal insulation, made of carbon-graphite composite material, is attached inside the cover on special hangers.
The lower elliptical cover is made of stainless steel with a water cooling jacket. Pipes with three water-cooled current leads are installed on the cover. The rotation mechanism and thermocouple are attached to the bottom of the cover. Thermal insulation is attached to special supports on the inside of the lower cover. It is made of carbon-graphite composite material. The graphite heater, located below the table, is attached to the current leads. The table is attached to the rotation mechanism on a special tool. During the carbonization process, the table rotates using the rotation mechanism attached to the bottom of the cover. The current leads and the shaft of the rotation mechanism have vacuum seals that ensure tightness. The lower cover is attached to the loading device through special brackets.
The cylindrical heating chamber is made of stainless steel and has a water cooling jacket. The heating chamber is located vertically on the overpass and is attached to brackets at four points located on the top of the overpass. The chamber has three cooled current leads and a thermocouple for measuring temperature. Thermal insulation made of carbon composite graphite materials is attached inside the chamber, which in turn is attached to a steel screen. The screen on brackets is attached together with the thermal insulation to the body of the heating chamber. The chamber has the necessary brackets made of carbon graphite materials, on which the graphite heater is attached. The heating chamber has a branch pipe for connecting to the vacuum system.
The lifting and turning mechanism has a screw pair and a bracket to which the top cover is attached. The bracket is inserted into the guide pipe with a rotary groove. The gearbox with an electric motor is attached from below to the guide pipe. The entire lifting and turning mechanism is attached vertically to the heating chamber body.
The loading device is a platform with four wheels, two of which are driving wheels, connected by a common axle to the travel reducer via a chain transmission. Two jacks, made in the form of rectangular posts, are located on the platform. A screw pair, connected via bevel gears to the lifting mechanism axle, is located inside the posts. The posts have grooves and guides along which the supports move. The supports are attached to the lower cover. The loading device moves along a rail track located on the foundation.
The electrical wiring is designed to provide power supply to the heaters from transformers and to provide power to the control circuits of the mechanisms of the units with electric drives. The electrical wiring has a busbar, harnesses and protective covers and boxes in which the wires are laid.
The power cabinet, control cabinet, operator's console and cover control panel are designed to ensure uninterrupted operation and control of the technological process performed at the installation.
The vacuum system is designed to create a vacuum in the chamber volume and to let inert gas into it when cooling the product. The system consists of a forevacuum pumping line and a booster pumping line.
A pumping ramp is designed to let inert argon gas into the chamber.
The pneumatic system is designed to control the pneumatic drives of the vacuum valves. The pneumatic system consists of an air preparation unit, a panel of pneumatic distributors and pipelines.
The water cooling system is designed to supply and drain water required to cool the vacuum pump systems during the process mode. The water cooling system is divided into two circuits and consists of pressure and drain manifolds. One circuit cools the vacuum system, and the other cools the lid bottom jackets, chamber current leads, thyristors and the chamber itself.
Technical data
Maximal temperature, °C
2000
Silicon melt temperature, °C
1600
Limiting residual pressure, Pa (mmHg)
6,65*10 -1 (5*10 -3)
Leakage, lPa/s (l.mmHg/s)
0.7 (5.25)
Dimensions of the operating space (Ø*H), mm
1300*1000
Dimensions of the workpiece (Ø*H), mm
1250*1000
Time to reach operating temperature, h
3
Siliconizing time, h
1 - 1.5
Cooling water consumption, m 3/h
15
Chamber capacity, m 3
5.65
Overall dimensions (L*W*H), mm
7200*7430*5120
Noise level, dBa
80
Power supply voltage, V
400
Nominal frequency, Hz
50
Pphases
3
Installed power, kW
420
Detailed information PDF
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